This is the ceramic gas filter that has a feature as high accuracy filtration and high corrosion resistance. It is removed the particle in the gas piping system in the high level, and is achieved the high selectivity. (It can bake 200℃, and is decreased the H20 density to 5ppb or less.)
Filtration Accuracy: 0.003/0.0015μm, recommended flow rate: 10 to 200L/min
Metal Gas Filter
This is the high-efficiency gas filter for ULSI manufacture. SUS316L used for constructional material of filter, realizing high heat resistance with compact body and high filtration accuracy(460℃).
RGF Series
Tube element, filtration accuracy: 0.1 to 10μm, recommended flow rate: 40 to 60L/min
Hastelloy® is used for the element and housing material, allowing the compact size to handle higher gas flow rates with extremely low pressure drop.
UCS-H Series
Elements made of Hastelloy® , filtration accuracy: 0.003μm, recommended flow rate: 15 to 250L/min
UCH/UCHX-M Series
Hastelloy® used for all materials , filtration accuracy: 0.003/0.0015μm, recommended flow rate: 15 to 250L/min
PTFE Gas Filter
This is high corrosion resistance inline gas filter that PTFE used for element. Two-layer filtration film made of PTFE causing high efficiency filtration and low pressure loss, and it supplies the use point with gas without dropping the purity of the gas.
TF Series
Filtration Accuracy: 0.01μm, recommended flow rate: 40 to 5000L/min * The TF-4 series was discontinued in May 2017.
STF/STFX Series
Filtration Accuracy: 0.003/0.0015μm, recommended flow rate: 40 to 5000L/min * The STF-4 series was discontinued in May 2017.
STF/STFX-3000 Series
Filtration Accuracy: 0.003/0.0015μm, recommended flow rate: 40 to 170L/min
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