ProductsIGS (Integrated Gas System)

IGS (Integrated Gas System)

IGS (Integrated Gas System)
Gas filter and pressure sensor for IGS.
FI/FIX/SI/SIX Series
A lineup of ceramic filters and all-metal filters with an established reputation for high filtration accuracy and corrosion resistance for gas filters for various integrated gas panels (filtration accuracy 0.003/0.0015μm, recommended flow rate several LPM to 80LPM)
PC Series
Pressure sensor for various integrated gas systems featuring high accuracy and high corrosion resistance, capable of measuring a wide range of both gauge and absolute pressures (output forms: 0 to 100mV, 0 to 50mV, 4 to 20mA, 0 to 5V)

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